Design and Fabrication of Microheaters intended for Localized Carbon Nanotube Growth Essay

This kind of paper gives the design, architecture and heat imaging of three microheaters (Fig. 1) and the growth and portrayal of single-walled carbon nanotubes (SWNTs) (Fig. 5) in these microstructures. SWNTs have sufficient superior real estate suitable for beyond-CMOS technology scaling and high-sensitivity chemical and biological receptors. For material synthesis, substance vapor deposition (CVD) is a widely used approach that generates high-quality SWNTs [1][2][3]. However , the high CVD growth temperature (typically 800-1000п‚°C) prevents all their integration upon a popular CMOS program. Although some low-temperature growth methods have been recently reported [4][5][6], abiliyy with foundry CMOS techniques still is still a challenge. Below we recommend a post-CMOS compatible co2 nanotube development method that bridges the gap between CVD and CMOS, by which microfabrication technology is used to create microheaters that could locally warm up for SWNT synthesis, going out of other areas remaining at low temperature. The localized heating is definitely realized by utilizing dry decoration processes to create a micro cavity to obtain thermal isolation. The fabrication procedure (shown in Fig. 2) starts coming from deposition of your 0. 5 пЃ­m heavy SiO2. A 0. a couple of пЃ­m heavy Pt microheater layer can then be sputtered and patterned applying lift-off procedure. Another zero. 5 пЃ­m SiO2 layer is transferred and patterned as the mask to discharge microheater hotplates (or bridges) suspended on the micro cavity. The SiO2 over microheaters can be imprinted for immediate contact between Pt and SWNTs. The first microheater design (Fig. 1a) is definitely an 87Г—87 пЃ­mВІ micro-hotplate with a meander Pt resistor embedded, which has the potential because gas sensors. The second microheater (Fig. 1b) has a curled shape designed to study E-field distribution and E-field improvement of carbon dioxide nanotube position. The third microheater is further simplified into one straight range (5 пЃ­m wide and 120 пЃ­m long) (Fig. 1c) to get studying temp and SWNT density...

Referrals: [1] A. M. Cassell, J. A. Raymakers, T. Kong, They would. Dai, L. Phys. Chem. B, Vol. 103, No . 31, pp. 6484-6492, 1999.

[2] Y. Choi, M. Sippel-Oakley and A. Ural, Applied Physics Letters, Vol. 89, 153130, 2006.

[3] Yung Joon Jung et al., L. Phys. Chem. B, Volume 107, pp. 6859-6864, the year 2003.

[4] To. Englander, Deb. Christensen and L. Lin, Applied Physics Letters, Vol. 82, Number 26, pp. 4797-4799, 2003.

[5] A. In den wehen liegen et al., Transducers'05, Volume. 1, pp. 93-96, Summer 2005.

[6] M. Cantoro et ing., Nano Words, Vol. six, No . 6, pp. 1107-1112, 2006.



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